最小流量：0.1SCCM 最大流量：5000SLPM
M100-QR快速響應氣體層流質量流量計與S100-QR的區別在於沒有觸摸式顯示屏，從100ms縮短至20ms,大幅提高流量測量效率，節省工藝成本，精度保持在±1%讀數，適用氣體快速波動下的流量精確測量。
PIG-M101-QR-00-0500 | 0.5 SCCM
PIG-M101-QR-01-0001 | 1 SCCM
PIG-M101-QR-01-0002 | 2 SCCM
PIG-M101-QR-01-0005 | 5 SCCM
PIG-M101-QR-01-0010 | 10 SCCM
PIG-M101-QR-01-0020 | 20 SCCM
PIG-M102-QR-01-0050 | 50 SCCM
PIG-M102-QR-01-0100 | 100 SCCM
PIG-M102-QR-01-0200 | 200 SCCM
PIG-M102-QR-01-0500 | 500 SCCM
PIG-M102-QR-01-1000 | 1000 SCCM
PIG-M102-QR-01-2000 | 2000 SCCM
PIG-M120-QR-02-0005 | 5 SLPM
PIG-M120-QR-02-0010 | 10 SLPM
PIG-M120-QR-02-0020 | 20 SLPM
PIG-M120-QR-02-0050 | 50 SLPM
PIG-M120-QR-02-0100 | 100 SLPM
PIG-M120-QR-02-0200 | 200 SLPM
PIG-M150-QR-02-0500 | 500 SLPM
PIG-M150-QR-02-1000 | 1000 SLPM
PIG-M150-QR-02-1500 | 1500 SLPM
PIG-M150-QR-02-2000 | 2000 SLPM
PIG-M150-QR-02-3000 | 3000 SLPM
PIG-M150-QR-02-4000 | 4000 SLPM
PIG-M150-QR-02-5000 | 5000 SLPM
PIG-M101-QR-00-0500 | 0.5 SCCM
PIG-M101-QR-01-0001 | 1 SCCM
PIG-M101-QR-01-0002 | 2 SCCM
PIG-M101-QR-01-0005 | 5 SCCM
PIG-M101-QR-01-0010 | 10 SCCM
PIG-M101-QR-01-0020 | 20 SCCM
